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Process Gases

Products and Services

Air Liquide offers pure and mixed gases as well as gas handling equipment and related services for nearly every application imaginable. Developing custom products is our specialty.

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Scott Brand Semiconductor Process Gases

Scott Gas Mixtures from Air Liquide

These products feature both guaranteed concentration and accuracy for each component in the mixture, making them among the most widely used process gases in the semiconductor industry.

Arsine AsH3

Typically used for silicon semiconductor doping applications and photovoltaic film deposition where the N-type dopant property provided by arsine is desired.

Download arsine specifications


Diborane

Ideal for silicon semiconductor doping applications and photovoltaic film deposition where the P-type dopant property provided by boron is desired.

Download diborane specifications


Germane GeH4

Ideal for silicon semiconductor doping and photovoltaic film deposition applications.

Download germane specifications


Phosphine PH3

Typically used for silicon semiconductor doping applications and photovoltaic film deposition where the N-type dopant property provided by phosphorus is desired.

Download phosphine specifications


Silane SiH4

Ideal for silicon semiconductor and photovoltaic film deposition applications.

Download silane specifications


Trimethylboron B(CH3)3

TMB mixtures are ideal for photovoltaic film deposition.

Download TMB mixtures specifications


ASML Lens Gases

Air Liquide provides a complete selection of photolithography lens gas mixtures suitable for ASML and other photolithographic lens systems.

Download ASML lens gases specifications

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