• About Us
  • Air Liquide Group
    American Air Liquide is part of an international group specializing in gases for industry, health and the environment.
  • Careers
    We’re always seeking innovative minds to keep our businesses on the leading edge of their respective fields.
  • Contact Us
    Request a quote, send us your comments and questions, or call us toll-free at 877.715.8651.
  • Locations
    Over 30 locations with our own fleet of trucks
    to serve you with fast delivery.
  • Molecules that Matter
    

    We refine and offer molecules that provide definable value you
    can measure at your
    bottom line.

  • Responsible Care
    

    We’re committed to providing a safe, healthful workplace and to being an environmentally friendly neighbor in the community.

  • Team Scott at Air Liquide
    

    Applied Scott technology is still alive and well—it’s behind every Scott gas mixture we sell.

   

• Products and Services
  • Cylinder Specs and Packaging

    A wide variety of cylinders and sizes
    to meet specific
    customer needs.

  • ALEVIATE

     

    

    
    No-risk guarantee from Air Liquide.

  • ALNET
    

    
    ALNET™ is the distributor network designed for growth.

  • ALPHAGAZ and Other Pure Gases
    

    Several grades of pure gases with low impurity levels for laboratory, process and application-specific applications.

  • DATAL ALert Telemetry Management System

    

    
    Web-based, real-time cylinder gas and liquid management system.

  • Gas Handling Equipment

     

    Gas handling equipment for both specialty and industrial gases.

  • Industrial Gases
    High-accuracy mixtures and low-impurity pure gases in single and multi-cylinder packs.
  • IGAL

    

    
    IGAL™ insulated window filling system significantly reduces rare gas consumption.

  • i-SEE Gas Handling
    

    Improving Safety & Efficiency thru Equipment

  • Process Gases
    Innovative solutions that promote efficiency of your process and help achieve a competitive advantage in your marketplace.
  • Proficiency Testing
    Improve the credibility of your analytical laboratory capabilities. Identify potential analytical problems confidentially. Provide inter- and intracompany quality assurance.
  • Rare Gases
    Global leader in rare pure gases and gas mixtures.
  • Scott Gas Mixtures
    

    Mixtures for virtually any application, the Scott brand has long been the acknowledged world-
    wide standard for analytical accuracy.

  • SCOTTY Transportables
    

    SCOTTY Transportables provide ultra-pure and high-accuracy calibration gases in a wide variety of nonreturnable cylinder sizes and volumes.

  • SCOUT Cylinder Tracking
    

    
    The engine behind SHOP@airliquide, providing real-time, accurate cylinder inventory, delivery and location information.

  • SHOP@airliquide
    

    Reduce your purchasing costs, simplify your records keeping, minimize your on-site cylinder inventory and much more…

  • TurbinAL Continuous CO2 Delivery

    Continuous high-flow CO2 purge system for gas-fired turbine generators.

   

• Industry Offerings
  • Engine Emissions Testing
    A complete line of pure and mixed gases for measuring engine emissions from various sources.
  • Environmental Compliance
    Seven distinct product classes from the world’s foremost authority and supplier of environmental calibration mixtures.
  • Food and Beverage
    ALIGAL gases for Modified Atmosphere Packaging (MAP).
  • Homeland Security
    Over 40 standard Scott™ TIC mixtures and CWA simulants,
    with custom products
    our specialty.
    
  • Insulated Glass
    IGAL™ insulated window filling system significantly reduces rare gas consumption.
  • Laboratory Mixtures
    ALPHAGAZ MIX™ are
    gas mixtures engineered specifically for most commonly used analytical techniques.
  • Lighting Gases
    Rare gases used for lighting applications.
  • Natural Gas
    The most accurate standards available, these gas mixtures are ideal for custody transfer and other applications.
  • Oil and Gas
    We stock over 800 components for blending mixtures used for refining and petrochemical applications.
  • Pharmaceutical and Biotech
    PHARGALIS permits innovative customization without jeapordizing strict regulatory compliance.
  • Welding, Laser and Cutting
    Air Liquide gases deliver optimum performance for root shielding, plasma cutting, and arc welding.

   

• Proficiency Testing
  • Request More Information

   

• Technical Resources
  • Conversion Factors
    Units of measure and other related information.
  • Cylinder Specs and Packaging

    A wide variety of cylinders and sizes
    to meet specific
    customer needs.

  • Emergency Response
    

    Get help in the event of a gas emergency.

  • FAQs
    Answers to the
    questions we hear
    most often.
  • Glossary
    Terms and definitions commonly used in the industry.
  • ISO/IEC Accreditation
    What does it really mean to be duly certified and accredited?
  • MSDS
    Material Safety Data Sheets for products we sell.
  • Product Literature
    

    Downloadable with descriptions, features, benefits and technical information.

  • Regulator Selection and Maintenance
  • Sales Terms
    The where-as and
    where-for info, so
    there is no mistake.
  • Solutions Center
    Ask a question, get a quote, and more.
  • Specialty Gas Catalog
    

    The industry's most definitive reference guide for specialty gases and gas handling equipment.

  • Tech and Safety Data
    Do it right and do it safely with this information.

   

• Call Center
  • Contact Us
    Request a quote, send us your comments and questions, or call us toll-free at 877.715.8651.
  • Requst for Quote
  • Technical Resources
    All the specialty and industrial gas product, technical and safety information you need.

   

• News and Events
  • Press Room
    What’s new at Air Liquide— new product announcements, articles, white papers and more.
  • Blog
    Get the latest thoughts on specialty gases, industrial gases and gas handling equipment... and then some.
  • Trade Shows
    View our schedule of industry conference
    and trade show exhibits
    for 2011.
  • Webinars

    Register for upcoming webinars about specialty and industrial gases, and review recordings of past webinars too.

   

• Contact Us
  • Contact Us
    Request a quote, send us your comments and questions, or call us toll-free at 877.715.8651.
  • Request for Quote
  • Locations
    Over 30 locations with our own fleet of trucks
    to serve you with fast delivery.

   

• Home
   

Scott Semiconductor Process Gases

These products feature both guaranteed concentration and accuracy for each component in the mixture, making them among the most widely used process gases in the semiconductor industry.

Arsine AsH3

Typically used for silicon semiconductor doping applications and photovoltaic film deposition where the N-type dopant property provided by arsine is desired.

Download arsine specifications.

Diborane

Ideal for silicon semiconductor doping applications and photovoltaic film deposition where the P-type dopant property provided by boron is desired.

Download diborane specifications.

Germane GeH4

Ideal for silicon semiconductor doping and photovoltaic film deposition applications.

Download germane specifications.

Phosphine PH3

Typically used for silicon semiconductor doping applications and photovoltaic film deposition where the N-type dopant property provided by phosphorus is desired.

Download phosphine specifications.

Silane SiH4

Ideal for silicon semiconductor and photovoltaic film deposition applications.

Download silane specifications.

Trimethylboron B(CH3)3

TMB mixtures are ideal for photovoltaic film deposition.

Download TMB mixtures specifications.

ASML Lens Gases

Air Liquide provides a complete selection of photolithography lens gas mixtures suitable for ASML and other photolithographic lens systems.

Download ASML lens gases specifications.

Request for quote

• Kill Gas
• Leak Detection Mixtures
• Lighting Gases
• Molten Aluminum
• Steel and Heat Treatment
• Semiconductor